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Air Bearings (23 companies)

Stage Air Bearings

  • Aerotech

    Aerotech designs and manufactures motion control and positioning systems. Their air bearings are used in semiconductor equipment, fiberoptics, photonics, and other critical industrial automation applications. Aerotech air bearings incorporate an active preload on both vertical and horizontal surfaces.

  • Alio Industries

    Alio Industries manufactures several air bearing systems for linear, rotary and their own X-Y Planar System. Their air bearings utilize dovetail and custom designs to exceed nano precision applications. These systems are available with ceramic servo motors or ironless cogless linear servo motors depending on your application needs.

    Wheat Ridge
    State: CO
  • Dover - Danaher Motion

    Dover - Danaher Motion's Ultra-Smooth Air Bearings are useful in applications where extreme velocity control is needed. It combines the non-contact technology of air bearings, linear motors, and linear encoders, which means no wearing parts and excellent reliability. The Airglide stage also has up to 10 air or vacuum lines available at the table carriage for clamps or purge lines. Standard travels range from 200 to 400mm travel.

    Westborough
    State: MA
  • General Microtechnology & Photonics (GMP)

    General Microtechnology & Photonics offers air bearing tables. Driven by brushless linear servomotors, the air bearings can be used in semiconductor equipment, fiberoptics, photonics, and other critical industrial automation applications. Features include 0.5 nm closed-loop resolution, fully preloaded air-bearings, and low-noise linear amplifiers.

  • Heason Technology

    Heason Technology offers a variety of air bearing stages including The AirBeam Series for computer-to-plate systems, photoplotters, wafer scanning systems, and factory automation applications. AirGlide air bearings are designed for scanning applications with ultra-smooth linear motion of ± 200 nanometers at 5 mm/second. The FiberBeam is designed to meet the demands of photonic alignment and assembly systems. The MicroBeam linear motor positioners are specifically designed for high performance in a small package.

  • Nelson Air Corp.

    Nelson Air offers a variety of precision air bearings and integrated positioning systems designed to meet the needs of many applications.

    Milford
    State: NH
  • Newport

    Newport offers HybrYX single plane XY hybrid air bearings. The HybrYX stage is suited for semiconductor wafer inspection systems and emerging maskless lithography applications. Features include scanning velocity up to 600mm/sec and 0.6G acceleration, and true single plane XY architecture with optional theta and Z-Tip-Tilt solutions.

    Irvine
    State: CA